Electrical and mechanical characterization of lateral NEMS switches

May 11, 2011
May 11, 2011

R. Hinchet, L. Montes, G. Bouteloup, G. Ardila, R. Parsa, K. Akarvardar, R.T. Howe and H.-S. Philip Wong, “Electrical and mechanical characterization of lateral NEMS switches“, IEEE DTIP 2011, May 11-13 2011, Aix-en-Provence, France, proceedings pp. 348-351 (Oral presentation). ISBN: 978-1-61284-905-8

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